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Nanopores of anodic aluminum oxides (AAO) of different pore sizes were produced using a temperature controlled two-step anodization. We report on the use of a carbon-rich Pt-based material, obtained by electron and ion beam assisted deposition from metal-organic precursor, as a mask for pattern transfer processes. Thin and narrow mask

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vapor deposition growth Topics by Science.gov

Mar 14, 2018Controllable growth of aluminum nanorods using physical vapor deposition. PubMed Central. and by varying the substrate temperature. When grown under medium vacuum, the nanorods are in the form of an aluminum metal aluminum oxide core-shell. (CVD) for processing integrated circuits and describes fully automatic machine for CVD. CVD

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